Voice coil motor nano stage with an eddy current damper
Jan 1, 2008ยท,,,,,ยท
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Yongdae Kim
Byounguk Sohn
Woosub Youm
Jongkyu Jung
Jonghyun Lee
Kyihwan Park
Type
Publication
10th International Conference on Control, Automation, Robotics and Vision, ICARCV 2008, Hanoi, Vietnam, 17-20 December 2008, Proceedings